3D-shape measurement apparatus
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United States of America Patent
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Mar 9, 2004
Grant Date -
Sep 5, 2002
app pub date -
Dec 11, 2001
filing date -
Dec 11, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a 3D-shape measurement apparatus, a photoreceptive optical system for linearly scanning a target-to-be-measured with a scanning light beam and guiding a reflected light beam from the object to a scanning convergence lens is constituted such that the position of an apparent emission point of the reflected light to be incident on the scanning convergence lens moves in the same direction as the direction along which the scanning light beam deviates due to deformation of a scanning optical system, and the apparent emission point is always positioned on a scanning plane even when the scanning position varies.
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