Vacuum load lock, system including vacuum load lock, and associated methods
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United States of America Patent
Stats
-
Mar 9, 2004
Grant Date -
Jul 17, 2003
app pub date -
Jan 11, 2002
filing date -
Jan 11, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A system is provided that includes a load lock apparatus having an interior configured to receive an object. At least one inlet valve may be flow coupled to the interior of the load lock apparatus, and at least one outlet valve may also be flow coupled to the interior of the load lock apparatus. A controller may be configured to selectively control opening and closing of the at least one inlet valve. The load lock apparatus may include an object receiving mechanism that is movable within the interior of the load lock apparatus to throttle the evacuation of the interior. Several methods of using the system and load lock apparatuses are also disclosed.
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