Ceramic-embedded micro-electromagnetic device and method of fabrication thereof
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United States of America Patent
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Feb 17, 2004
Grant Date -
Mar 27, 2003
app pub date -
Aug 23, 2002
filing date -
Sep 24, 2001
priority date (Note) -
Expired
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Abstract
A micro-electromagnetic device is formed by providing internal channels in a ceramic housing sintered from ceramic materials with high dielectric strength and infiltrating these channels with molten metal. The invention allows the fabrication of arrays of ceramic embedded micro-electromagnetic devices as well as ceramic embedded helical micro-antennas designed for use in the high GHz and THz regions at a fraction of the present cost of manufacturing of such devices and with virtually no restriction to their miniaturization.
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