Flexural plate wave sensor and array
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United States of America Patent
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Feb 10, 2004
Grant Date -
Apr 10, 2003
app pub date -
Sep 11, 2002
filing date -
Mar 20, 2000
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Abstract
A method for manufacturing a flexural plate wave sensor including the steps of depositing a sacrificial material layer over a silicon substrate, depositing a membrane layer over the sacrificial material layer with the membrane layer covering the sacrificial material layer and contacting the silicon substrate, depositing a piezoelectric layer over the membrane layer, forming a first transducer on the piezoelectric layer, forming a second transducer on the piezoelectric layer, spaced from the first transducer, removing the sacrificial material layer to expose a portion of the membrane layer, and depositing an absorptive coating on the exposed portion of the membrane layer.
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