Coating workpiece method using beam of plasma
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United States of America Patent
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Feb 3, 2004
Grant Date -
N/A
app pub date -
Feb 5, 2002
filing date -
Apr 29, 1999
priority date (Note) -
Expired
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Abstract
Method for coating workpieces generates a beam of a plasma in an evacuated container. A region of highest plasma density is at the beam axis and workpieces having surfaces to be coated, are radially offset from, and extend along the axis with the surfaces facing the axis and being in the container. Fresh reactive gas is inlet into the container and consumed gas is removed from the container. Coating material is deposited upon the surfaces with a deposition rate of at least 400 nm/min and at a maximum temperature of the surfaces being 550.degree. C.
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