Laser beam machining apparatus and laser beam machining method
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United States of America Patent
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Jan 20, 2004
Grant Date -
Jan 2, 2003
app pub date -
Jun 21, 2002
filing date -
Jun 22, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A laser beam machining apparatus forms blind holes at predetermined intervals in a workpiece by intermittently irradiating a laser beam from a laser nozzle to the workpiece while the laser nozzle and the workpiece being moved relatively. During the time the workpiece is subjected to machining, the electrostatic capacity between the support member and the laser nozzle is detected by an electrostatic capacity sensor while the workpiece made of conductive material is supported on the support member. The irradiation output power is controlled by a control unit which operates to vary the number of output pulses from the laser nozzle each time one hole is formed according to the result detected in response to variation in the thickness of the workpiece.
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