Method of producing flat panels

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United States of America Patent

PATENT NO 6679977
APP PUB NO 20030062255A1
SERIAL NO

10236636

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method for producing flat panels for TFT or plasma display applications includes forming a sputter source within a sputter coating chamber, the source having at least two electrically mutually isolated stationery bar-shaped target arrangements. A controlled magnet arrangement provided under each target with a time-varying magnetron field.

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Patent Owner(s)

Patent OwnerAddress
TEL SOLAR AGHAUPTSTRASSE 1A TRUBBACH 9477

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Grunenfelder, Pius Wangs, CH 7 147
Haag, Walter Grabs, CH 30 328
Krassnitzer, Siegfried Feldkirch, AT 65 272
Schlegel, Markus Azmoos, CH 10 111
Schwendener, Urs Buchs, CH 7 117

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Patent Citation Ranking

  • 11 Citation Count
  • C23C Class
  • 49.53 % this patent is cited more than
  • 21 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges141998945301399733901 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0102030405060708090100110120130140150160170180190200210

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