Accelerometer and spherical sensor type measuring instrument
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United States of America Patent
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Jan 20, 2004
Grant Date -
N/A
app pub date -
Jun 18, 2002
filing date -
Apr 27, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An object is to provide an accelerometer or a spherical sensor-type measurement device, able to control by means of an active restraining control system a spherical mass part or a spherical sensor part. The accelerometer or spherical sensor-type measurement device has a spherical mass part, which is levitated by electrostatic supporting forces, and electrodes positioned so as to surround the spherical mass part and which have spherical inner surfaces; the above electrodes include a plurality of electrostatic supporting electrodes, positioned symmetrically with respect to the spherical mass part, and a displacement detection electrode, positioned between the electrostatic supporting electrodes.
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