Microwave enhanced CVD method and apparatus
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United States of America Patent
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Jan 13, 2004
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N/A
app pub date -
Jun 6, 1995
filing date -
Nov 10, 1986
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Expired
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Abstract
A new chemical vapor reaction system is described. Instead of ECR where electrons can move as independent particles without interaction, a mixed cyclotron resonance is a main exciting principal for chemical vapor reaction. In the new proposed resonance, the resonating space is comparatively large so that a material having a high melting point such as diamond can be deposited in the form of a thin film by this inovative method.
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