Method of synthesizing metal doped diamond-like carbon films
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United States of America Patent
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Dec 30, 2003
Grant Date -
Feb 6, 2003
app pub date -
Jul 6, 2001
filing date -
Jul 6, 2000
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Expired
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Abstract
A method of synthesizing metal doped carbon films by placing a substrate in a chamber with a selected amount of a metalorganic compound. An electron cyclotron resonance is applied to the chamber in order to vaporize the metalorganic compound. The resonance is applied to the chamber until a metal doped carbon film is formed. The metalorganic compound is preferably selected from the group consisting of an organic salt of ruthenium, palladium, gold or platinum.
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