Method for vacuum treatment of workpieces and vacuum treatment facility
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United States of America Patent
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-
Dec 30, 2003
Grant Date -
N/A
app pub date -
Jan 22, 2002
filing date -
Apr 16, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A lock chamber (1) is isolated from the environment (U) by a lock-valve (3) and from a vacuum chamber configuration (7) by a lock valve (5). A turbo vacuum pump (13) acts upon the vacuum chamber configuration (7). An additional pump (9/15) is switchably (17) connected downstream from the pump, which switchably operates either as a prevacuum pump for the turbo vacuum pump (13) or as lock chamber pump.
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