System and method of multi-dimensional force sensing for scanning probe microscopy
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United States of America Patent
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Dec 23, 2003
Grant Date -
Sep 5, 2002
app pub date -
Jun 13, 2001
filing date -
Feb 5, 1999
priority date (Note) -
Expired
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Abstract
A scanning probe microscopy tool is provided with a force sensor that simultaneously measures more than one component of a surface force. The tool is comprised of an oscillator, a tip, a mechanical actuator, a sensing system, and a feedback control system. The oscillator has a selected shape, dimensions ratio, and /or material composition such that the oscillator comprises a first resonant mode for a first direction, wherein a first resonance of the first resonance mode can be altered by a surface force interaction between the tip and the sample in the first direction; and a second resonant mode for a second direction, wherein a second resonance of the second resonant mode can be altered by the surface force interaction between the tip and the sample in the second direction. The sensing system is adapted to sense the alterations in the first and second resonances, is adapted to provide a first output based on the alterations in the first resonance, and is adapted to provide a second output based on alterations in the second resonance. The feedback control system is adapted to control the actuator based on the first and second outputs.
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