Shroud nozzle for gas jet control in an extreme ultraviolet light source
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Dec 9, 2003
Grant Date -
N/A
app pub date -
Apr 25, 2000
filing date -
Apr 25, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A gas jet nozzle (20, 60) for an extreme-ultraviolet light (EUV) source, including a housing (22, 62) having a front (24, 64) and a back (26, 66). The housing (22, 62) is coupleable to a primary gas source (44) and a secondary gas source (46) and is adapted to. expel primary gas (36, 76) and secondary gas (42, 82) from the housing front (24, 64). The housing (22, 62) has a gas-expelling primary channel (39, 70) located centrally within the housing (22, 62) and a gas-expelling secondary channel (34, 74) proximate the primary channel (39, 70). The primary channel (39, 70) may be circular and the secondary channel (34, 74) may be annular, surrounding the primary channel (39, 70). A secondary gas stream (42, 82) expelled from the secondary channel (34, 74) restricts the lateral expansion of a primary gas stream (36, 76) expelled from the primary channel (39, 70), optimizing gas jet properties and reducing heating and erosion of the nozzle (20, 60).
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