Scanning electron microscope
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United States of America Patent
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Dec 2, 2003
Grant Date -
May 1, 2003
app pub date -
Oct 21, 2002
filing date -
Oct 25, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A scanning electron microscope is provided which is capable of efficiently detecting ions, such as primary electron excitation ions, reflection electron excitation ions or secondary electron excitation ions caused by a bias electric field, thereby obtaining an absorption current. A scanning electron microscope irradiates an electron beam to a sample while keeping a sample chamber pressure at 1 Pa or higher, to detect generated ions and display a sample image. An ion detecting electrode is provided exclusively for detecting ions. The ion detecting electrode is arranged nearby a path for accelerating ions by a bias electrode.
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