Coating installation for disk-form workpieces
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United States of America Patent
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Dec 2, 2003
Grant Date -
Jan 17, 2002
app pub date -
Jun 21, 2001
filing date -
Jun 22, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for manufacturing a coated substrate disk, comprises linearly bringing the substrate on a mounting, into an evacuated transport chamber and rotating the mounting in the chamber. The mounting is then extended into a coating position and coating of the substrate takes place. The mounting is then linearly retracted into the chamber again and rotated into a position for guiding the substrate out of the chamber. These steps are repeated for several substrates and then a pump opening into the chamber is closed by means of the mounting or the substrate. The chamber is then flooded and vacuum-tightly closed and the pump opening is released. The chamber is evacuated and the substrate moving and coating steps are repeated for more substrates.
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