Wafer polishing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 2, 2003
Grant Date -
Jun 27, 2002
app pub date -
Dec 14, 2001
filing date -
Dec 25, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In the wafer polishing apparatus for pressing a wafer against a polishing pad with an air bag, which is provided to a carrier, pressing area regulating members are attached to the bottom face of the carrier, whereby areas for pressing the wafer with the air bag are regulated. The pressing area regulating members are prepared in order to regulate different areas to be pressed. The areas for pressing the wafer with the air bag can be changed by replacing the pressing area regulating members when suitable.
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