Front opening unified pod (FOUP) hoist jig
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United States of America Patent
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-
Dec 2, 2003
Grant Date -
N/A
app pub date -
Dec 11, 2001
filing date -
Dec 11, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus and method for simultaneously cycle-testing two wafer storage containers is provided. The two wafer containers are maintained in a counterbalance relationship to each other and cycled in a vertical up-and-down motion to simulate the forces of a selected overhead transport system.
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