Focusing-device for the radiation from a light source
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United States of America Patent
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Dec 2, 2003
Grant Date -
Aug 22, 2002
app pub date -
Sep 10, 2001
filing date -
Sep 13, 2000
priority date (Note) -
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Abstract
A focusing-device for the radiation from a light source, in particular a laser plasma source, has a collector mirror which collects the light from the light source at a second focus in virtual or real terms, in particular for micro-lithography using EUV radiation, and a routing unit and downstream beam formation in an illuminating system. The collector mirror can be displaced in the z-direction (optical axis) and is designed and/or mounted in such a way that the position of the second focus remains unchanged in the event of temperature changes.
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