Magnetron having a lowered oscillation frequency and processing equipment employing the same
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United States of America Patent
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Nov 25, 2003
Grant Date -
Apr 18, 2002
app pub date -
Oct 17, 2001
filing date -
Oct 18, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A magnetron has an anode cylinder, a plurality of vanes extending radially inwardly from the anode cylinder, a cathode filament extending along a center axis of the anode cylinder, an output section including an antenna coupled to one of the vanes, and a magnetic circuit section for supplying a magnetic field into the anode cylinder, whereby the magnetron oscillates at a fundamental frequency in a range from 400 MHz to 600 MHz.
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