X-ray detector and charged-particle apparatus
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United States of America Patent
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Nov 25, 2003
Grant Date -
Aug 1, 2002
app pub date -
Dec 19, 2001
filing date -
Jan 26, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a high-sensitivity X-ray detector, an image of the secondary electrons is little shifted and deformed by the astigmatism or the like even when it approaches very close to a specimen set on the stage of an electron microscope. When a beam of charged particles strike a specimen, the specimen emits backscattered charged particles along with X-rays. To prevent such undesired charged particles from entering into the X-ray detecting element of the X-ray detector, a means for generating a first magnetic field is applied. Another means for generating a second magnetic field is provided to cancel the magnetic filed leaked from the first means for generating magnetic field at the position of the specimen.
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