Low species buffered rinsing fluids and method
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United States of America Patent
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Nov 25, 2003
Grant Date -
N/A
app pub date -
Nov 30, 1999
filing date -
Nov 30, 1999
priority date (Note) -
Expired
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Abstract
A method of rinsing an electronic substrate recognizes that adding a buffer to a rinsing fluid eliminates fluctuations in the amount of residues on an electronic substrate, and a buffered rinsing fluid is prepared by (a) providing water from a water source; (b) deionizing the water to produce deionized water; (c) adding a buffer to the deionized water at a concentration effective to eliminate fluctuations in the amount of residues on the electronic substrate. The electronic substrate is rinsed with the buffered rinsing fluid.
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