Exfoliating method, transferring method of thin film device, and thin film device, thin film integrated circuit device and liquid crystal display device produced by the same
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United States of America Patent
Stats
-
Nov 11, 2003
Issued Date -
N/A
app pub date -
Mar 7, 2002
filing date -
Aug 27, 1996
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method for transferring a thin film device on a substrate onto a transfer member, includes a step for forming a separation layer on the substrate, a step for forming a transferred layer including the thin film device on the separation layer, a step for adhering the transferred layer including the thin film device to the transfer member with an adhesive layer therebetween, a step for irradiating the separation layer with light so as to form internal and/or interfacial exfoliation of the separation layer, and a step for detaching the substrate from the separation layer.
First Claim
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