Pressure sensor device
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United States of America Patent
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Nov 11, 2003
Grant Date -
Sep 26, 2002
app pub date -
Mar 26, 2002
filing date -
Mar 26, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
A pressure sensor device is described that has a diaphragm acted upon by a working medium, on a first side, and a sensor chip, which is disposed on a second side of the diaphragm that is remote from the working medium. There is formed in the sensor chip a measuring bridge having four sensor elements, which form two pairs disposed parallel, and the pairs are disposed at right angles to one another. The sensor elements are disposed such that they are closely spaced apart from one another in the edge region of the sensor chip that faces toward the central point of the diaphragm.
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