Protective layer for multilayers exposed to x-rays
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United States of America Patent
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Nov 4, 2003
Grant Date -
Jul 10, 2003
app pub date -
Jan 10, 2002
filing date -
Jan 10, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An optical element for diffracting x-rays that includes a substrate, a diffraction structure applied to the substrate, the diffraction structure including an exterior surface facing away from the substrate and the diffraction structure capable of diffracting x-rays and a protective layer applied to the exterior surface.
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