Method and apparatus to generate a ground level of a semiconductor IC tester having a plurality of substrates
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United States of America Patent
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Nov 4, 2003
Grant Date -
N/A
app pub date -
Nov 6, 2000
filing date -
Dec 1, 1999
priority date (Note) -
Expired
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Abstract
When performing supply and measurement of various signals on n=8 semiconductor IC devices under test DUT1-DUT8 using m=3 substrates 10-30, reference voltages of the devices under test DUT1-DUT3 are input to the substrate 10, reference voltages of the devices under test DUT4-DUT6 are input to the substrate 20, and reference voltages of the devices under test DUT7 and 8 are input to the substrate 30. The reference voltages input to each substrate 10-30 are averaged. The mean voltages made in each substrate are further connected to each other, and a reference voltage is made using three substrates 10-30. The reference voltage is used as a reference voltage for voltage generating circuits 11-31. The reference voltage having no variation among each substrate is set even if the number of semiconductor IC devices under test is increased and the whole equipment becomes large.
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