Movable evaporation device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 4, 2003
Grant Date -
Oct 3, 2002
app pub date -
May 31, 2002
filing date -
Nov 10, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A movable evaporation device, arranged in an evaporation system. The evaporation system has an evaporation chamber and a vacuum system. The vacuum system is connected to the evaporation chamber externally. The evaporation chamber has a rotatable wafer table to fix and rotate a wafer during thin film deposition. The movable evaporation device has several movable evaporation boats to carry evaporation source. Each of the evaporation boat further includes an evaporation boat and a movable arm. The moving arm is connected to a bottom of the evaporation chamber. The moving arms can rotate from 0.degree. to 360.degree., and the length of the moving arms are determined by the amount and position of the evaporation boats in the evaporation chamber.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully