Device having a barrier layer located therein and a method of manufacture therefor
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United States of America Patent
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Oct 28, 2003
Grant Date -
Dec 5, 2002
app pub date -
Jun 5, 2001
filing date -
Jun 5, 2001
priority date (Note) -
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Abstract
A device for use in a micro-electro-mechanical system (MEMS) optical device. The device includes a substrate having opposing first and second sides and a diffusion barrier layer formed over at least the first side. The device further includes a light reflective optical layer formed over the diffusion barrier layer on the first side of the substrate. The second side may desirably have a stress balancing layer located thereover.
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