MEMS optical switches having obliquely angled inputs and outputs relative to a face thereof and moveable reflectors with parallel positions therein and methods of forming same
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United States of America Patent
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Oct 21, 2003
Grant Date -
Apr 25, 2002
app pub date -
Aug 24, 2001
filing date -
Aug 29, 2000
priority date (Note) -
Expired
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Abstract
MEMS optical switches can include a substrate having first and second opposing faces and at least one side therebetween. An input is obliquely angled towards the face and optically couples optical radiation towards the face. A movable reflector is on the face and moves from a first position to a second position that is parallel to the first position to reflect the optical radiation from the input to provide reflected optical radiation. A output is obliquely angled away from the face and optically couples the reflected optical radiation away from the face.
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