Temperature control of micro-mirrors of an optical switch substrate
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United States of America Patent
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Oct 14, 2003
Grant Date -
N/A
app pub date -
Mar 27, 2001
filing date -
Mar 27, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A temperature control system is provided for an optical switch including steerable micro-mirrors. The system includes at least one sensor and associated sensing circuitry for measuring the temperature of a micro-mirror or a region of a substrate near a micro-mirror. The system also includes a controller that responds to a signal provided by the sensing circuitry. The controller response may include activating heating or cooling devices the region that is sensed to adjust the temperature of the region.
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