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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE LIMITED	1 YISHUN AVENUE 7 SINGAPORE 768923

International Classification(s)

• G21K:TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNET....
• G03B:APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS O....
• A61N:ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY;....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Bleeker, Arno Jan	Steenovens 67, Westerhoven, NL 5563 CE	99	3022
de, Jager Pieter Willem Herman	Buitenbassinweg 142, Rotterdam, NL 3063 TB	85	1247
Kruit, Pieter	Koornmarkt 49, Delft, NL 2611 EB	103	1318
van, der Mast Karel Diederick	Geeneindseweg 7, Helmond, NL 5708 BB	28	879

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
October 14, 2003	US,6633366,B2   US6633366B2	GRANTED PATENT AS SECOND PUBLICATION
May 09, 2002	US,20020054284,A1   US20020054284A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 6633366

Lithographic apparatus, device manufacturing method, and device manufactured thereby

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