Method and apparatus having pin electrode for surface treatment using capillary discharge plasma
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 14, 2003
Grant Date -
Aug 1, 2002
app pub date -
Jan 31, 2001
filing date -
Jan 31, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method and an apparatus for treating a workpiece using a plasma are disclosed in the present invention. In treating a workpiece using a plasma, the apparatus includes at least one pin electrode for receiving a power source, a dielectric body having first and second sides, wherein the first side is coupled to the pin electrode and the second side has at least one capillary extending to a direction of the first side of the dielectric body, and each capillary is substantially aligned with each pin electrode, and a counter electrode electrically coupled to the pin electrode for generating the plasma from each capillary.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully