Device for adjusting the distribution of microwave energy density in an applicator and use of this device
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United States of America Patent
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Oct 7, 2003
Grant Date -
Dec 19, 2002
app pub date -
Jun 18, 2002
filing date -
Feb 4, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to a device for adjusting the distribution of microwave energy density in an applicator which forms a resonator chamber and in which the radiation generated by microwave generators is guided to the applicator wall by waveguides; and to a use for this device. According to the invention, several electroconductive coupling pins (31) are used, each of these extending preferably vertically into both the waveguide chamber and the applicator resonator chamber, in order to feed in the microwaves with as little loss as possible and to enable the field distribution in the resonator chamber to be modified. The invention is especially suitable for producing a plasma.
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