Device for delivering charged powder for deposition
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 7, 2003
Grant Date -
Apr 18, 2002
app pub date -
Jul 11, 2001
filing date -
Jul 11, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Provided, among other things, is a re-circulating particle feed apparatus comprising: a circular conduit of dimensions suitable for circulating gas with suspended particles; a deposition station comprising an opening onto the conduit, into which opening an electrostatic chuck fits, with a deposition surface of the chuck available to the interior of the conduit; and a propulsion device for maintaining fluid and particle circulation through the conduit, wherein the propulsion device is adapted to maintain fluid and particle circulation at a rate that brings a deposition effective amount of particles within a range of electro-attractive influence at the deposition station.
First Claim
Other Claims data not available
