Vacuum pump
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United States of America Patent
Stats
-
Oct 7, 2003
Grant Date -
Feb 14, 2002
app pub date -
Jul 26, 2001
filing date -
Jul 31, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
To provide a vacuum pump that may heat a flow path of gas effectively with small electric power. A vacuum pump provided with an outer sleeve, a stator received in a hollow portion of the outer sleeve, a rotor received rotatably within the hollow portion of the outer sleeve for forming a flow path of gas in cooperation with the stator, a base to which the outer sleeve and the stator are to be fixed and supported, a heating electromagnet for generating heat by current supply and forming a magnetic field, a magnetic member forming a magnetic path of magnetic force by the heating electromagnet, and a heat radiation plate made of aluminum and fixed to the magnetic member.
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