Contact-less ballistic scanning method
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United States of America Patent
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Sep 30, 2003
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N/A
app pub date -
Jul 18, 2000
filing date -
Jul 18, 2000
priority date (Note) -
Expired
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Abstract
In accordance with the present invention a scanning method for flat objects obtains reciprocating ballistic motion without any physical contact between the mutually moving parts, as contact can create particulate matter causing defects. The method ensures that the peak forces attained during scanning are minimized to prevent dislodgement of particulate material and excessive vibration. The method furthermore ensures that both surfaces of flat plate objects be scanned simultaneously.
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