Electrocapacitive force measuring apparatus
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United States of America Patent
Stats
-
Sep 30, 2003
Grant Date -
N/A
app pub date -
May 17, 2001
filing date -
Mar 4, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A sensor unit is formed by a single integral body obtained by coupling a resiliently deforming portion with a base portion without interposing a soft material therebetween, and a force applied to a probe secured to a front end of the resiliently deforming portion is measured as a change in capacitance of a capacitor constituted by electrodes secured to opposing surfaces of the resiliently deforming portion and base portion. These electrodes are connected to a resonance circuit of a high frequency oscillation circuit, and in order to measure a change in a resonance frequency which is varied in accordance with the applied force, an output signal from the high frequency oscillation circuit is counted by a digital frequency counter for a predetermined time period. It is possible to provide the electrocapacitive type force measuring apparatus which can measure a very small force with an extremely high precision without being affected by temperature variation, humidity variation and secular variation.
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