Microelectromechanical device having single crystalline components and metallic components
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United States of America Patent
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Sep 30, 2003
Issued Date -
N/A
app pub date -
Jun 26, 2001
filing date -
Aug 25, 1999
priority date (Note) -
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Abstract
A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate, a microactuator disposed on the substrate and formed of a single crystalline material, and at least one metallic structure disposed on the substrate adjacent the microactuator While the MEMS device can include various microactuators, one embodiment of the microactuator is a thermally actuated microactuator that may include a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. Thus, on actuation, the microactuator moves between a first position in which the microactuator is spaced apart from the at least one metallic structure to a second position in which the microactuator operably engages the at least one metallic structure.
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