Manufacture of fine-grained electroplating anodes
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United States of America Patent
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Sep 30, 2003
Grant Date -
Jan 2, 2003
app pub date -
Jul 2, 2001
filing date -
Jul 2, 2001
priority date (Note) -
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Abstract
A continuously cast copper ingot is made by a procedure in which turbulence is imparted to the metal/solid interface during the casting operation. The ingot is then hot worked to form a billet having a smaller average grain size and a larger diameter than possible in the past. The billet is especially useful for making electroplating anodes used in the damascene process for making copper interconnects in silicon wafers.
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