Substrate coated with an MGO-layer
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United States of America Patent
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Sep 23, 2003
Grant Date -
N/A
app pub date -
Dec 5, 1997
filing date -
Nov 20, 1997
priority date (Note) -
Expired
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Abstract
A method and apparatus for producing a substrate which is coated with a Mgo-layer, includes a pair of Mg targets which define a slit and which have a target purity of at least 99 percent. A working gas flows along the slit. Oxygen is provided in an area between the slit and the substrate to be coated. The temperature of the substrate is set by heating or cooling the substrate during the coating process.
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