Method and sensor for detecting strain using shape memory alloys

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United States of America Patent

PATENT NO 6622558
SERIAL NO

09726257

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Abstract

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A method and sensor for detecting strain using shape memory alloys is disclosed. The sensor comprises a substrate material, a flexible diaphragm provided on the substrate material and a thin film SMA material deposited on the flexible diaphragm. The thin film SMA material is capable of undergoing a phase transformation in response to a physical stimulus being applied thereto. During such a phase transformation, a change occurs in the electrical resistance of the thin film SMA material. By measuring the value of the electrical resistance of the thin film SMA material immediately before and after the thin film SMA material undergoes a phase transformation, the difference in the value of the electrical resistance can be determined and utilized to determine the magnitude of the physical stimulus that was applied to the thin film SMA material causing it to undergo a phase transformation.

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Patent Owner(s)

Patent OwnerAddress
ORBITAL RESEARCH INC4415 EUCLID AVE SUITE 500 CLEVELAND OH 44103

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Benard, William L Reston, VA 1 8
Huff, Michael A Fairfax, VA 42 1025
Lisy, Frederick J Euclid, OH 59 968
Prince, Troy S Cleveland, OH 16 397

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