Micro-supercapacitor
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United States of America Patent
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Sep 16, 2003
Grant Date -
Mar 6, 2003
app pub date -
Sep 5, 2001
filing date -
Sep 5, 2001
priority date (Note) -
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Abstract
A microelectronic supercapacitor is amenable to being fabricated using micro electromechanical systems (MEMS) techniques. By utilizing MEMS techniques, the supercapacitor in accordance with the present invention can be formed with volumes <1 mm.sup.3. As such, such microelectronic supercapacitor is suitable for use in applications in which only a few millimeters are available for both a supercapacitor and an energy storage device, such as a battery.
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