Method to enhance performance of thermal resistor device
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United States of America Patent
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Sep 16, 2003
Grant Date -
Apr 4, 2002
app pub date -
Aug 29, 2001
filing date -
Sep 29, 2000
priority date (Note) -
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Abstract
An apparatus including a contact on a substrate, a dielectric material overlying the contact, a phase change element overlying the dielectric material on a substrate, and a heater element disposed in the dielectric material and coupled to the contact and the phase change element, wherein a portion of the dielectric material comprises a thermal conductivity less than silicon dioxide. A method including introducing over a contact formed on a substrate, a dielectric material, a portion of which comprises a thermal conductivity less than silicon dioxide, introducing a heater element through the dielectric material to the contact, and introducing a phase change material over the dielectric material and the heater element.
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