Method and apparatus for depositing thin layers

United States of America Patent

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Sep 16, 2003
Grant Date
Jun 6, 2002
app pub date
Nov 1, 2001
filing date
Nov 16, 2000

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Expired

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Abstract

The present invention relates to a method and to apparatus for depositing thin layers. The technical field of the invention is that of manufacturing thin layer optical devices. In the invention, apparatus for depositing thin layers on a plurality of substrates comprises means for producing a light beam for monitoring the optical thicknesses of the substrates.

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Patent Owner	Address
HIGHWAVE OPTICAL TECHNOLOGIES MARSEILLE	ZONE INDUSTRIELLE SAINT-MITRE AVENUE DE LA ROCHE FOURCADE AUBAGNE 13400

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Inventor Name	Address	# of filed Patents	Total Citations
Grezes-Besset, Catherine	Marseilles, FR	1	1

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Method and apparatus for depositing thin layers

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United States of America Patent

10015820

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PATENT NO	6620249
APP PUB NO	20020068126A1
SERIAL NO	10015820
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
September 16, 2003	US,6620249,B2 US6620249B2	GRANTED PATENT AS SECOND PUBLICATION
June 06, 2002	US,20020068126,A1 US20020068126A1	FIRST PUBLISHED PATENT APPLICATION

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10015820

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