Method for forming oxidation-passive layer, fluid-contacting part, and fluid feed/discharge system

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United States of America Patent

PATENT NO 6612898
SERIAL NO

09202105

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Abstract

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A method for forming an oxidation-passive layer having high corrosion resistance to highly oxidizing materials such as ozone; a stainless steel and a titanium base alloy having corrosion resistance to an ozone containing fluid; and a fluid containing part, a process apparatus, and a fluid feed/discharge system made by using the same. The method comprises the steps of heat-treating the surface of a stainless steel or titanium-base alloy having an Al content of 0.5 percent by weight to 7 percent by weight either at 300.degree. C. to 700.degree. C. in a mixed gas atmosphere composed of an inert gas and 500 ppb to 1 percent H.sub.2 O gas or 1 ppm to 500 ppm oxygen gas, or alternatively at 20.degree. C. to 300.degree. C. in a mixed gas atmosphere composed of an oxygen gas and at least 100 ppm ozone gas to form an oxidation-passive layer containing an aluminum oxide or a titanium oxide.

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Patent Owner(s)

Patent OwnerAddress
TADAHIRO OHMI AND KABUSHIKI KAISHA ULTRACLEAN TECHNOLOGY RESEARCH INSTITUTE1-4 HONGO 4-CHOME BUNKYO-KU TOKYO 113-0033

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nitta, Takahisa Tokyo, JP 46 742
Ohmi, Tadahiro Miyagi-ken, JP 798 14083

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