Apparatus for fixing substrates

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6612558
SERIAL NO

09674140

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus for fixing and centering substrates that are each provided with an inner hole is provided. The apparatus has a housing having an axis that extends perpendicular to the plane of a substrate placed on the apparatus. A fixation unit is guided in the housing and is introducible into the inner hole of a substrate. The fixation unit includes an outer element that is moveable along the axis of the housing and relative to the housing, and also includes an inner element that is moveable along the axis of the housing and relative to the housing and to the outer element, which, by way of a relative movement of the inner and outer elements, is expandable for engagement with the inner hole of a substrate.

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Patent Owner(s)

Patent OwnerAddress
STEAG HAMATECH AG75447 STERNENFELS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Denzler, Ludwig Keltern, DE 2 5
Speer, Ulrich Eisingen, DE 9 12
Weber, Klaus Bretten, DE 112 1120

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