Electrode array for field cages
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United States of America Patent
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Aug 26, 2003
Grant Date -
N/A
app pub date -
Jul 30, 1999
filing date -
Dec 20, 1996
priority date (Note) -
Expired
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Abstract
An electrode configuration for field cages, especially in microsystems, comprises a large number of electrodes in which an electrical potential can be applied to each end region through a feed region. The end region is arranged to form the field cage and inhomogeneous shielding fields outside the field cage. To reduce thermal convection, the feed region has a strip form whose width is substantially smaller than characteristic dimensions of the end region.
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