Vacuum pump and vacuum apparatus
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United States of America Patent
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Aug 19, 2003
Grant Date -
N/A
app pub date -
Aug 26, 1999
filing date -
Aug 28, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A vacuum pump capable of controlling a gas sucking performance is provided. A conductance variable mechanism (50) is arranged at an inlet port (16) formed inside a flange (11). The conductance variable mechanism (50) allows the area of a cross-section of the inlet port to be increased or decreased relative to the direction where gas is fed, so that an amount of gas to be sucked from the inlet port (16) can be controlled.
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