Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Aug 5, 2003
Grant Date -
N/A
app pub date -
Apr 17, 2000
filing date -
Apr 19, 1999
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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ASML NETHERLANDS B V | 5500 AH VELDHOVEN |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Bisschops, Theodorus H J | Eindhoven, NL | 9 | 645 |
# of filed Patents : 9 Total Citations : 645 | |||
Bouwer, Adrianus G | Nuenen, NL | 16 | 893 |
# of filed Patents : 16 Total Citations : 893 | |||
Driessen, Johannes C | Eindhoven, NL | 13 | 644 |
# of filed Patents : 13 Total Citations : 644 | |||
Renkens, Michael J M | Geleen, NL | 7 | 569 |
# of filed Patents : 7 Total Citations : 569 | |||
Soemers, Hermanus M J R | Mierlo, NL | 13 | 592 |
# of filed Patents : 13 Total Citations : 592 | |||
Vijfvinkel, Jakob | Eindhoven, NL | 19 | 674 |
# of filed Patents : 19 Total Citations : 674 |
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Patent Citation Ranking
- 483 Citation Count
- H01J Class
- 99.61 % this patent is cited more than
- 22 Age
Forward Cite Landscape
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

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Jun 19, 2024 | MAFP | MAINTENANCE FEE PAYMENT | free format text: PAYMENT OF MAINTENANCE FEE, 12TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1553); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 12 |
Jun 24, 2020 | MAFP | MAINTENANCE FEE PAYMENT | free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 8 |
Jun 27, 2016 | FPAY | FEE PAYMENT | year of fee payment: 4 |
Jun 13, 2016 | AS | ASSIGNMENT | free format text: CHANGE OF NAME;ASSIGNOR:AIRCELLE;REEL/FRAME:040698/0286 Owner name: SAFRAN NACELLES, FRANCE Effective Date: Jun 13, 2016 |
Jan 01, 2013 | I | Issuance | |
Dec 12, 2012 | STCF | INFORMATION ON STATUS: PATENT GRANT | free format text: PATENTED CASE |
May 12, 2011 | P | Published | |
Jan 13, 2010 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SOULIER, PASCAL-MARIE PAUL MARCEL;DE SORBAY, AURELIE;REEL/FRAME:023947/0545 Owner name: AIRCELLE, FRANCE Effective Date: Jan 13, 2010 |
Aug 06, 2008 | F | Filing | |
Aug 20, 2007 | PD | Priority Date |

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