Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses

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United States of America Patent

PATENT NO 6603130
SERIAL NO

09551223

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B V5500 AH VELDHOVEN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bisschops, Theodorus H J Eindhoven, NL 9 645
Bouwer, Adrianus G Nuenen, NL 16 893
Driessen, Johannes C Eindhoven, NL 13 644
Renkens, Michael J M Geleen, NL 7 569
Soemers, Hermanus M J R Mierlo, NL 13 592
Vijfvinkel, Jakob Eindhoven, NL 19 674

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Patent Citation Ranking

  • 483 Citation Count
  • H01J Class
  • 99.61 % this patent is cited more than
  • 22 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges46652195632918109432401 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +050100150200250300350400450500550600650700

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