MEMS optical switch with a notched latching apparatus for improved mirror positioning and method of fabrication thereof
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jul 29, 2003
Grant Date -
N/A
app pub date -
Oct 25, 2000
filing date -
Oct 25, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In at least one embodiment, the apparatus includes an actuator arm, a mirror structure, and a latch mounted between the arm and the mirror structure. The latch has a first end mounted to the arm and a fastener connected to the mirror structure. The fastener has a fastener support surface and a fastener side surface, where the fastener support surface is in contact with the mirror structure. The fastener support surface and the fastener side surface are angled to each other to define a fastener corner. At the fastener corner is a fastener notch. Likewise, the mirror structure can include a catch for receiving the latch on a substantially flat catch support surface, which is created by a catch notch at the corner of the catch support and side surfaces. In at least one embodiment, the method includes steps of fabrication of the apparatus.
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