Diffraction grating and uses of a diffraction grating
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United States of America Patent
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Jul 29, 2003
Grant Date -
Feb 28, 2002
app pub date -
May 23, 2001
filing date -
May 24, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A diffraction grating (1) has a multiplicity of parallel diffraction structures succeeding one another periodically. The latter are arranged on a support (2) and each incorporate a slat (3) extending from a base area (4) of the support (2). Said slat has a substantially rectangular cross-section. The width w of the slat (3) comes to less than 100 nm, preferably between 20 nm and 60 nm, more preferably in the area of 50 nm. Advantageous uses of the diffraction grating (1) are obtained e.g. in a Littrow configuration, preferably in third order of the incident light beams (8), in particular at a light wavelength that is less than 250 nm.
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